Photo-acid generators听(PAGs) are a vital component听of many semiconductor photolithography formulations, especially chemically amplified resists (CARs). The outlook for fully听removing听PFAS-containing materials听from PAGs industrywide听is much more uncertain.听To date, no replacement molecules (either commercially available or in a research phase) have been found that could match the performance of existing PFAS PAGs. Even if听it is possible to develop non-PFAS PAGs for all applications, the impact and timeline from subsupplier听to supplier to device manufacturer听is extensive.听
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