This white paper discusses known uses of PFAS-containing articles, specific performance requirements driving their use, and potential alternatives. We听will provide听examples of the use of听fluoropolymers in equipment and facility systems that facilitate听the manufacture of integrated circuits听(ICs),听and how the unique properties of PFAS-containing听polymers enable the semiconductor manufacturing process. We听will also discuss currently听unidentified but reasonably foreseeable听uses of fluoropolymer articles;听the underlying reasons hindering identification;听and the measures for identifying, reporting听and substituting such articles.听
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